Seal function in semiconductor processing
Ferrofluid vacuum seals that transmit rotational movement into a vacuum atmosphere are used in the manufacturing process of semiconductors. In semiconductor manufacturing processes, these seals have a defined role in each process. For Chemical Vapor Deposition (CVD), the seals maintain a vacuum in the reaction chamber to uniformly form a thin film on a wafer and rotate the wafer within the chamber. They perform a similar function in Physical Vapor Deposition (PVD). This common requirement makes the seal's reliability a primary concern for equipment engineers.
Addressing high-temperature limitations
Seal failure at elevated temperatures has historically been a barrier in certain applications. Recent development work has focused on a new magnetic fluid formulated to minimize outgassing even at high temperatures. This fluid, paired with an enhanced magnetic fluid seal structure, enables the production of long-lasting seal units for CVD equipment in applications where seals were previously considered unsuitable. The specific advantage is reliable performance in active gas environments at elevated temperatures.
Integration with modern deposition systems
The seals are integrated into complex system components. One example is a rotating, height and tilt adjustable substrate holder. Such systems often include programmable coating processes managed via interfaces like a 7-inch colored touch-screen with USB data transfer. The goal is precise thin film deposition for fabricating films used in solar cells, batteries, and microelectronic devices. Optional add-ons for these systems can include RF sputtering sources, glow discharge plasma rods, and planetary rotation stages for uniform coating.
Selecting the right deposition technique
Both PVD and CVD are essential for modern thin-film technology. Understanding their differences helps in selecting the optimal method for industrial needs, whether for advanced semiconductors, protective coatings, or optical films. The choice of deposition technique influences the performance and efficiency of the final product. The vacuum seal is a supporting component that must perform reliably across both techniques, despite their different process environments.
We provide related sealing solutions for these demanding applications.