Standard feedthroughs fall short in specialized applications
Modern vacuum chambers are designed with provisions for multiple large flanges, like 8-inch CF, configured with an assortment of customer-defined feedthroughs. This fact, noted in industry equipment profiles, means standard single-shaft components often cannot meet the need. The demand is for feedthroughs with non-standard, multi-functional designs that integrate several motion or utility lines through one port. This drives the requirement for multi-axle solutions.
The mechanics of the magnetic fluid barrier
Ferrofluid vacuum seals create a non-contact magnetic fluid barrier. This enables smooth shaft rotation while maintaining reliable vacuum integrity. For systems with multiple independent shafts, this technology allows each to rotate without mechanical wear or lubricant contamination. The global market for these components is bifurcated into single axle and multi-axial feedthrough segments. While single axle types are common, complex deposition tools require the latter.
Direct application in deposition processes
Thin film deposition technologies like sputtering and CVD rely on precise internal motion. Sputtering is classified as a dry plating method, and it is an indispensable technology for thin film deposition that requires high quality for semiconductors and FPDs. CVD equipment supplies gas to a heated substrate to form a film. These processes frequently need independent rotation of multiple targets, shutters, or substrate holders within a single vacuum chamber. A dual or tri-axle feedthrough with a non-coaxial design addresses this by transmitting motion for several components through one compact flange.
The push for compact, multi-function designs
Equipment manufacturers face constant pressure to increase capability while minimizing chamber size and flange count. A feedthrough with three independent, non-coaxial shafts consolidates multiple feed points. This aligns with the industry trend toward chambers packed with customer-defined instrumentation. The precision bearing and independent rotation features of multi-axle units support the accurate, reliable motion transfer needed for consistent film quality in ALD reactors and thermal evaporation systems.
We provide engineering and products for these complex vacuum motion challenges. Our portfolio includes dual axle KF mount and tri-axle CF mount feedthroughs designed for such applications.