Industry shift toward smarter, smaller systems
Recent industry analysis points to a 2026 shift toward smarter, AI-driven vacuum deposition systems. These advanced systems often use precision-focused chambers under 20 inches. This trend directly influences the components specified for these tools, including rotary feedthroughs. The demand is for units that support complex internal routing without compromising the vacuum seal.
Enabling process development and instrumentation
Hollow axle feedthroughs with a through-bore are particularly useful for process development applications. They allow for the supply of cooling, power, or instrumentation leads to a rotating part inside the vacuum chamber. According to technical documentation, a Deublin water union can be integrated for external water connections, where the water feed tubes rotate with the shaft. This capability is fundamental for thermal management in processes like ion implantation or etching.
Meeting application-specific mounting and size needs
Standardized models exist to meet various interface requirements. Available configurations include hollow shaft designs with KF, CF, or compliant cartridge mounts. Bore diameters are specified to exact dimensions, such as 50 mm, 75 mm, 0.5 inches, and 1 inch. For applications requiring strong integration, o-ring grooved ANSI/ASA compatible flanges are a common feature on flanged hollow shaft models. Specific part numbers, like AFM0075WNR10, denote units with combined features, such as a 75mm diameter hollow axle with integrated water cooling.
Supporting high-precision semiconductor fabrication
In semiconductor manufacturing, these components see direct use in wafer testing, sort and mapping equipment, and PVD/CVD systems. High speed, large diameter hollow shaft feedthroughs are also configured for optical coating applications, which are critical for fiber optic filter manufacturing. Some designs use a double ferrofluidic seal to enable static access to the rear of the seal, supporting more complex assembly. Drive is typically supplied via a toothed belt or an integral brushless motor within the housing.
We manufacture a range of these feedthroughs, including hollow shaft, cartridge mount, and CF flange versions, for engineers designing next-generation vacuum systems.